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Metrology Nanomefos Non-contact Measuring

Metrology Nanomefos Non-contact Measuring

Country/Region china
Company Chongqing FUMA Precision Equipment Co.,Ltd.
Categories Non Contact AC Voltage Detector
Update 2018-04-06 09:14:17
ICP License Issued by the Chinese Ministry
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Nanomefos Non-contact Measuring
Category: MetrologyPublish Time: 2016-12-24 11:49

Measurable shapes: convex concave,flat, aspherical, freeform
Measurement range500 x 100 mm
NANOMEFOS is a unique metrology tool, enabling measurement of high accuracy aspherical and freeform optics. This fast, non-contact machine is capable to measure optics ranging from convex to concave and from flat to freeform, up to 500 mm diameter, with a measurement uncertainty below 15 nm RMS.

The instrument operates like a giant cd-player, in which the surface under test is placed on an air-bearing spindle, while a specially developed optical probe is positioned over it by a motion system.

NANOMEFOS is a unique non-contact metrology tool for high accuracy aspherical and freeform optics. The optical probe enables high scanning speeds (up to 1.5 m/s) and its 5 mm measurement range captures the nonrotational symmetry of the surface. A separate silicon carbide metrology frame and interferometry system provide a stable reference.

Measurable shapes: convex concave, flat, aspherical, freeform
Measurement range500 x 100 mm
Maximum slope: +90° to -45° (cylindrical to concave)
Measurement uncertainty: < 15 nm RMS
Typical measurement time: < 15 min

Universal for any shape, particularly suitable for single-piece production
Absolute form measurement (including radius of curvature)
Unlimited aspherical departure, up to 5 mm freeform departure
Suitable for refractive as well as reflective optics
No back-face or ghost images
Able to measure form, waviness (mid-spatials) and roughness

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