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Grease Lubrication Turbo Molecular Pumps

Categories Vacuum Pumps
Brand Name: ROYAL
Model Number: RT-TPG63/70
Certification: ISO
Place of Origin: MADE IN CHINA
MOQ: 1
Price: negotiable
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 200 SETS/MONTH
Delivery Time: 1 week
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
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Grease Lubrication Turbo Molecular Pumps

High Vacuum Turbo Molecular Pump - Grease Lubrication-TPG63/70

Typical Applications:

High Vacuum Turbo Molecular pumps are widely used in various of

1. PVD and CVD coating systems: Optical coating machine, hard coatings, Tool coating machine; magnetron and arc plating machines; ITO, LED, OLED coating system;

2. R&D applications:

Science and engineering
Space simulation
Particle accelerator technology
Material analysis
Renewable energies
Plasma technology

3. Semiconductor, Lithography, Metrology , CVD, PVD, Etching, Ion implanter.
4. Other industries like: Metallurgy
Auto leakage detecting
Appliance industry leakage detecting
Energy storage and transport leakage detecting
Cryogenic vessels
Chemical process
Vacuum drying
Vacuum exhausting
Vacuum furnace
Electron beam welding
Medical instrument and equipment

RT-TPG63/70 Turbomolecular Pump Technical Data

Pumping Speed(L/S)70
Inlet FlangeDN63 ISO-K, DN63CF
Outlet FlangeKF16 (DN)
Compression RationN2, 2x106 ; H2: 4x103
Ultimate Vacuum (Torr)≤1.5x10-7 (DN63 ISO-K) ≤4.5x10-8(DN63CF)
Ultimate Vacuum (Pa)≤2x10-5 (DN63 ISO-K) ≤6x10-6(DN63CF)
Ration Speed (rpm)51000
Run-up Time (min)1.5
Bearing TypeCeramic
Backing Pump (L/S)0.8~2
Cooling MethodWater /Air
Cooling Water Temp.(℃)10~25
Bake-out Temp.(℃)≤100
Ambient Temp.(℃)5~40(water) 5~32(air)
Mounting directionAny
Weight ( kg)3.5 / 4.8

RT-TPG63/70 Pumping Speed

RT-TPG63/70 Dimensions

Please contact us for your applications, we are honored to serve you with our excellent service and quality.

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