Low - E Film Magnetron Sputtering Coating Machine, R2R web metallizing system

Low-E Film Web Coater / Web Roll to Roll Vacuum Sputtering Coating Machine

We are pleased to propose our MultiWeb-Series Roll to Roll Vacuum Sputtering Web Coater to meet your multi-layer deposition requirements.

Low-E Film Web Coater Applications: electronic paper, flexible circuits, photovoltaic, medical strips, RFID (Radio Frequency Identification) and Low-E film.

DEPOSITION FILMS
1. Substrate material: PET, PEN, PES, PI, PC, PA,... Films
2. Substrate thickness: 15~300μm
3. Deposition methods: AC Reactive for SiO2(Dielectric); Pulsed DC for ITO (Metal & Conductor)
4. Oxide conductor TCO: ITO, AZO, IZO...
5. Metal conductor: Al, Cu, Mo, Ag...
6. Optical film: Ta2O5, Nb2O5, SiO2, TiO2...
7. Semiconductor: ZnO, InGaZnO...
8. Insulator: SiO2, SiNx, AlOx, AlNx...
9. Uniformity: ±5% Across Web

The MultiWeb Coater provides the following key features:
A. One chamber divided into multi-pressure zones to accommodate various deposition sources.
B. Multi-Source simultaneous deposition capabilities in one web pass, for multi-layer coating.
C. Reversible web winding direction enables deposition of unlimited layers without breaking vacuum.
D. Precision web handling mechanisms with edge-guide to allow multiple passes without loss of alignment. (Optional)
E. AC Invert web drive system for accurate control of multiple web speeds.
F. In-line optical and/or resistance thickness monitoring systems, to control precise deposition thickness and uniformity. (Optional)
G. Chamber is constructed of SUS304L Stainless with low out gassing components to insure deeper vacuum.
H. Vacuum pumping by a combination of turbo-molecular pump and low temperature cryogenics, to provide clean vacuum without moisture or oil contamination.

GENERAL SPECIFICATIONS

Vacum chamber body: single chamber multi-pressure zones

Moveable carriages: Web Carriage

Deposion Zone: 2 X Sputtering Zone (Optional: 3 Sputtering Zone)

Sputtering Source: 2 X Dual Cathode Sputter Source (Optional: 3 Dual Cathode Sputter Source)

Substrate Pre-treater: Linear Ion Source

Web Width: 1300mm

Winding Diameter: Φ600mm Max

Winding Direction: Bi-directional

Substrate thickness: 15~300μm

Web Line Speed:0.5~10M/min

Web Tension: 5.0PLI Max 0.5PLI Min

Web Alignment: ±3mm (one pass)

Hi-Vacuum Pump: Turbo Pump

Rough Vacuum Pump: Dry pump & Blower combination

Moisture Pump: Polycold Cryogenic

Deposition Thickness Control: Monitoring (Optional)

a: Transmit Optical; b: Eddy Current Resistance

System Operation: PLC Based Computer System Operation

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.